PYROLYZED PHOTORESIST THIN FILM: EFFECT OF ELECTRON BEAM PATTERNING ON DC AND THz CONDUCTIVITY.
| Autor: | Jorudas, J.1,2 justinas.jorudas@ftmc.lt, Rehman, H.1, Fedorov, G.1, Cojocari, M.1, Karvinen, P.1, Urbanowicz, A.2, Kašalynas, I.2, Matzui, L. Yu.3, Svirko, Y.1, Kuzhir, P.1 |
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| Zdroj: | Lithuanian Journal of Physics. 2023, Vol. 63 Issue 3, p155-163. 9p. |
| Databáze: | Academic Search Ultimate |
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