Design and Characterization of 5 μm Pitch InGaAs Photodiodes Using In Situ Doping and Shallow Mesa Architecture for SWIR Sensing †.

Autor: Tillement, Jules1,2,3 (AUTHOR) jules.tillement@st.com, Cervera, Cyril2 (AUTHOR), Baylet, Jacques2 (AUTHOR), Jany, Christophe2 (AUTHOR), Nardelli, François2 (AUTHOR), Di Rito, Thomas2 (AUTHOR), Georges, Sylvain1 (AUTHOR), Mugny, Gabriel1 (AUTHOR), Saxod, Olivier2 (AUTHOR), Gravrand, Olivier2 (AUTHOR), Baron, Thierry3 (AUTHOR), Roy, François1 (AUTHOR), Boeuf, Frédéric1 (AUTHOR) jules.tillement@st.com
Zdroj: Sensors (14248220). Nov2023, Vol. 23 Issue 22, p9219. 16p.
Databáze: Academic Search Ultimate
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