Artificial intelligence approach to analyze SIMS profiles of 11B, 31P and 75As in n- and p-type silicon substrates: experimental investigation.

Autor: Filali, Walid1 (AUTHOR) wfilali@cdta.dz, Boubaaya, Mohamed1 (AUTHOR), Garoudja, Elyes1 (AUTHOR), Lekoui, Fouaz2 (AUTHOR), Abdellaoui, Ibrahime2 (AUTHOR), Amrani, Rachid3 (AUTHOR), Oussalah, Slimane4 (AUTHOR), Sengouga, Nouredine5 (AUTHOR)
Zdroj: Zeitschrift für Naturforschung Section A: A Journal of Physical Sciences. Dec2023, Vol. 78 Issue 12, p1143-1151. 9p.
Databáze: Academic Search Ultimate
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