Exploring miscut angle influence on (100) β-Ga2O3 homoepitaxial films growth: Comparing MOVPE growth with MBE approaches.

Autor: Chou, Ta-Shun1 (AUTHOR) ta-shun.chou@ikz-berlin.de, Rehm, Jana1 (AUTHOR), Bin Anooz, Saud1 (AUTHOR), Ernst, Owen1 (AUTHOR), Akhtar, Arub1 (AUTHOR), Galazka, Zbigniew1 (AUTHOR), Miller, Wolfram1 (AUTHOR), Albrecht, Martin1 (AUTHOR), Seyidov, Palvan1 (AUTHOR), Fiedler, Andreas1 (AUTHOR), Popp, Andreas1 (AUTHOR)
Zdroj: Journal of Applied Physics. 11/21/2023, Vol. 134 Issue 19, p1-8. 8p.
Databáze: Academic Search Ultimate