Influence of growth temperature on the properties of aluminum nitride thin films prepared by magnetron sputter epitaxy.

Autor:	Sundarapandian, Balasubramanian1 (AUTHOR) balasubramanian.sundarapandian@iaf.fraunhofer.de, Yassine, Ali2 (AUTHOR), Kirste, Lutz1 (AUTHOR), Baeumler, Martina1 (AUTHOR), Straňák, Patrik1 (AUTHOR), Fisslthaler, Evelin3 (AUTHOR), Prescher, Mario1 (AUTHOR), Yassine, Mohamed2 (AUTHOR), Nair, Akash1 (AUTHOR), Raghuwanshi, Mohit1 (AUTHOR), Ambacher, Oliver2 (AUTHOR)
Zdroj:	Journal of Applied Physics. 11/14/2023, Vol. 134 Issue 18, p1-10. 10p.
Databáze:	Academic Search Ultimate
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