Towards lowering energy consumption during magnetron sputtering: Benefits of high-mass metal ion irradiation.
| Autor: | Greczynski, G.1 (AUTHOR) grzegorz.greczynski@liu.se, Hultman, L.1 (AUTHOR), Petrov, I.1,2 (AUTHOR) |
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| Zdroj: | Journal of Applied Physics. 10/14/2023, Vol. 134 Issue 14, p1-21. 21p. |
| Databáze: | Academic Search Ultimate |
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