Self-organized submicron structures in photoresist films by UV-laser irradiation at water-confined conditions.

Autor: Ehrhardt, Martin1 (AUTHOR) martin.ehrhardt@iom-leipzig.de, Lai, Shengying1,2 (AUTHOR), Lorenz, Pierre1 (AUTHOR), Zajadacz, Joachim1 (AUTHOR), Han, Bing2 (AUTHOR) hanbing@njust.edu.cn, Zimmer, Klaus1 (AUTHOR) klaus.zimmer@iom-leipzig.de
Zdroj: Applied Physics A: Materials Science & Processing. Sep2023, Vol. 129 Issue 9, p1-10. 10p. 1 Color Photograph, 1 Black and White Photograph, 2 Diagrams, 1 Chart, 2 Graphs.
Databáze: Academic Search Ultimate
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