Effect of deposition inhomogeneity on the Ohm resistance of thin electroless copper layers.

Autor: Radoeva, M.1, Radoev, B.2 radoev@chem.uni-sofia.bg, Stöckelhuber, K. W.3
Zdroj: Journal of Materials Science. Jun2003, Vol. 38 Issue 12, p2703-2707. 5p.
Databáze: Academic Search Ultimate