Effect of deposition inhomogeneity on the Ohm resistance of thin electroless copper layers.
Autor: | Radoeva, M.1, Radoev, B.2 radoev@chem.uni-sofia.bg, Stöckelhuber, K. W.3 |
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Zdroj: | Journal of Materials Science. Jun2003, Vol. 38 Issue 12, p2703-2707. 5p. |
Databáze: | Academic Search Ultimate |
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