Thermal annealing of superconducting niobium titanium nitride thin films deposited by plasma-enhanced atomic layer deposition.
| Autor: | González Díaz-Palacio, Isabel1,2 (AUTHOR), Wenskat, Marc1 (AUTHOR), Deyu, Getnet Kacha1 (AUTHOR), Hillert, Wolfgang1 (AUTHOR), Blick, Robert H.2 (AUTHOR), Zierold, Robert2 (AUTHOR) rzierold@physnet.uni-hamburg.de |
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| Zdroj: | Journal of Applied Physics. 7/21/2023, Vol. 134 Issue 3, p1-10. 10p. |
| Databáze: | Academic Search Ultimate |
| Externí odkaz: |
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