Low-energy argon ion bombardment-induced decomposition of physisorbed hydrofluorocarbons on silicon nitride surfaces: A computational mechanistic study.
| Autor: | Cheng, Erik S.1 (AUTHOR), Hwang, Gyeong S.1,2 (AUTHOR) gshwang@che.utexas.edu |
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| Zdroj: | Journal of Chemical Physics. 7/7/2023, Vol. 159 Issue 1, p1-10. 10p. |
| Databáze: | Academic Search Ultimate |
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