Mathematic modeling the oxygen distribution mechanism in Si ingots during growing processes.

Autor: Oksanich, A.P.1 oksanich@cat-ua.com, Pritchin, S. E.1, Vasheruk, A. V.1
Zdroj: Semiconductor Physics, Quantum Electronics & Optoelectronics. 2004, Vol. 7 Issue 3, p236-239. 4p.
Databáze: Academic Search Ultimate