Physics of microelectronic devices Diffusion of phosphorus in technology for manufacturing silicon p-i-n photodiodes.
| Autor: | Kukurudziak, M. S.1 mykola.kukurudzyak@gmail.com |
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| Zdroj: | Semiconductor Physics, Quantum Electronics & Optoelectronics. 2022, Vol. 25 Issue 4, p385-393. 9p. |
| Databáze: | Academic Search Ultimate |
| Externí odkaz: |
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