Fabrication of wafer-scale nanoporous AlGaN-based deep ultraviolet distributed Bragg reflectors via one-step selective wet etching.

Autor: Zhao, Yongming1 (AUTHOR), Shan, Maocheng1 (AUTHOR), Zheng, Zhihua1 (AUTHOR), Jian, Pengcheng1 (AUTHOR), Liu, WeiJie1 (AUTHOR), Tan, Shizhou1 (AUTHOR), Chen, Changqing1 (AUTHOR), Wu, Feng1 (AUTHOR) wufeng123@hust.edu.cn, Dai, Jiangnan1 (AUTHOR) daijiangnan@hust.edu.cn
Zdroj: Scientific Reports. 12/27/2022, Vol. 12 Issue 1, p1-7. 7p.
Databáze: Academic Search Ultimate
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