Self-Calibration of a Large-Scale Variable-Line-Spacing Grating for an Absolute Optical Encoder by Differencing Spatially Shifted Phase Maps from a Fizeau Interferometer.

Autor: Xiong, Xin1,2 (AUTHOR), Yin, Chenguang1 (AUTHOR), Quan, Lue1 (AUTHOR), Sato, Ryo1 (AUTHOR), Matsukuma, Hiraku1 (AUTHOR), Shimizu, Yuki3 (AUTHOR) yuki.shimizu@eng.hokudai.ac.jp, Tamiya, Hideaki4 (AUTHOR), Gao, Wei1 (AUTHOR)
Zdroj: Sensors (14248220). Dec2022, Vol. 22 Issue 23, p9348. 21p.
Databáze: Academic Search Ultimate
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