Characterization and formation of nanocrystalline diamonds in a-C/N films by filtered cathodic vacuum arc plasma

Autor: Hsieh, W.J.1, Shih, P.S.1, Lin, J.H.1, Lin, C.C.1, Chen, U.S.1, Huang, S.C.1, Chang, Y.S.1, Shih, H.C. hcshih@mse.nthu.edu.tw
Zdroj: Thin Solid Films. Dec2004, Vol. 469/470, p120-126. 7p.
Databáze: Academic Search Ultimate