Physical Features of the Functioning of a Planar Magnetron Sputter with a Thermally Insulated, Discharge-Heated Target for Boron Coating Deposition.

Autor:	Vizir, A. V.1 (AUTHOR) vizir@opee.hcei.tsc.ru, Nikolaev, A. G.1 (AUTHOR), Oks, E. M.1,2 (AUTHOR), Frolova, V. P.1,2 (AUTHOR), Cherkasov, A. A.1 (AUTHOR), Shandrikov, M. V.1 (AUTHOR), Yushkov, G. Yu.1 (AUTHOR)
Zdroj:	Russian Physics Journal. Apr2022, Vol. 64 Issue 12, p2177-2184. 8p.
Databáze:	Academic Search Ultimate
Externí odkaz:	Zobrazit plný text záznamu