Simple and practical methods for utilizing parylene C film based on vertical deposition and laser patterning.

Autor: Sim, Jee Hoon1 (AUTHOR), Chae, Hyeonwook1 (AUTHOR), Kim, Su-Bon1 (AUTHOR), Yoo, Seunghyup1 (AUTHOR) syoo.ee@kaist.edu
Zdroj: Scientific Reports. 6/9/2022, Vol. 12 Issue 1, p1-8. 8p.
Databáze: Academic Search Ultimate
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