Simple and Robust Microfabrication of Polymeric Piezoelectric Resonating MEMS Mass Sensors.
| Autor: | Ge, Chang1 (AUTHOR) cge@ece.ubc.ca, Cretu, Edmond1 (AUTHOR) |
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| Zdroj: | Sensors (14248220). Apr2022, Vol. 22 Issue 8, pN.PAG-N.PAG. 19p. |
| Databáze: | Academic Search Ultimate |
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