A Further Theoretical Study of Capacitive Pressure Sensors Based on Thin Film Elastic Deflection and Parallel Plate Capacitor: Refined Closed-Form Solution and Numerical Calibration.
| Autor: | Guo, Ying1,2 (AUTHOR) guoying@cqu.edu.cn, Li, Bo1 (AUTHOR) 202116131339@cqu.edu.cn, Zhang, Qi1 (AUTHOR) 202016021045@cqu.edu.cn, He, Xiao-Ting1,2 (AUTHOR) hexiaoting@cqu.edu.cn, Sun, Jun-Yi1,2 (AUTHOR) sunjunyi@cqu.edu.cn |
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| Zdroj: | Sensors (14248220). Apr2022, Vol. 22 Issue 8, pN.PAG-N.PAG. 33p. |
| Databáze: | Academic Search Ultimate |
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