Development of 3D Wafer Level Hermetic Packaging with Through Glass Vias (TGVs) and Transient Liquid Phase Bonding Technology for RF Filter.

Autor: Chen, Zuohuan1 (AUTHOR) xmuchenzh@stu.xmu.edu.cn, Yu, Daquan1 (AUTHOR) yudaquan@xmu.edu.cn, Zhong, Yi1 (AUTHOR)
Zdroj: Sensors (14248220). Mar2022, Vol. 22 Issue 6, p2114. 15p.
Databáze: Academic Search Ultimate
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