MEMS-tuned devices take on sensing and testing applications.
| Autor: | Anthon, Doug1 danthon@iolon.com, Berger, Jill D.2, Dutta, Subrata3 |
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| Zdroj: | Laser Focus World. Dec2004, Vol. 40 Issue 12, p99-103. 4p. |
| Databáze: | Academic Search Ultimate |
| Externí odkaz: |
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