Scaling of silicon nanoparticle growth in low temperature flowing plasmas.
| Autor: | Lanham, Steven J.1 (AUTHOR) sjlanham@umich.edu, Polito, Jordyn1 (AUTHOR) jopolito@umich.edu, Shi, Xuetao2 (AUTHOR) xuetao.shi@wayne.edu, Elvati, Paolo2 (AUTHOR) elvati@umich.edu, Violi, Angela1,2 (AUTHOR) avioli@umich.edu, Kushner, Mark J.1,3 (AUTHOR) mjkush@umich.edu |
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| Zdroj: | Journal of Applied Physics. 10/28/2021, Vol. 130 Issue 16, p1-18. 18p. |
| Databáze: | Academic Search Ultimate |
| Externí odkaz: |
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