REDUCTION OF IMPURITY SOURCES IN Si CRYSTAL GROWTH SYSTEM WITH ELECTRON GUN BEAM HEATING.
| Autor: | Kravtsov, A.1 doc@keppeu.lv, Virbulis, J.2, Krauze, A.2 |
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| Zdroj: | Lithuanian Journal of Physics. 2021, Vol. 61 Issue 3, p183-190. 8p. |
| Databáze: | Academic Search Ultimate |
| Externí odkaz: |
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