Towards energy-efficient physical vapor deposition: Mapping out the effects of W+ energy and concentration on the densification of TiAlWN thin films grown with no external heating.
Autor: | Li, X.1 (AUTHOR) xiao.li@liu.se, Bakhit, B.1 (AUTHOR), Johansson Jõesaar, M.P.2 (AUTHOR), Petrov, I.1,3,4 (AUTHOR), Hultman, L.1 (AUTHOR), Greczynski, G.1 (AUTHOR) |
---|---|
Zdroj: | Surface & Coatings Technology. Oct2021, Vol. 424, pN.PAG-N.PAG. 1p. |
Databáze: | Academic Search Ultimate |
Externí odkaz: |