Towards energy-efficient physical vapor deposition: Mapping out the effects of W+ energy and concentration on the densification of TiAlWN thin films grown with no external heating.

Autor: Li, X.1 (AUTHOR) xiao.li@liu.se, Bakhit, B.1 (AUTHOR), Johansson Jõesaar, M.P.2 (AUTHOR), Petrov, I.1,3,4 (AUTHOR), Hultman, L.1 (AUTHOR), Greczynski, G.1 (AUTHOR)
Zdroj: Surface & Coatings Technology. Oct2021, Vol. 424, pN.PAG-N.PAG. 1p.
Databáze: Academic Search Ultimate
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