后退火气氛对磁控溅射制备 β-Ga2O3 薄膜材料的影响.

Autor: 姬凯迪1 1204124952@qq.com, 高灿灿1, 杨发顺1,2,3, 熊倩1, 马奎1,2,3 kma@gzu.edu.cn
Zdroj: Journal of Synthetic Crystals. Jun2021, Vol. 50 Issue 6, p1056-1061. 6p.
Databáze: Academic Search Ultimate