Monolithic optical microlithography of high-density elastic circuits.
| Autor: | Zheng, Yu-Qing1, Liu, Yuxin2, Zhong, Donglai, Nikzad, Shayla, Liu, Shuhan, Yu, Zhiao3, Liu, Deyu, Wu, Hung-Chin, Zhu, Chenxin, Li, Jinxing, Tran, Helen, Tok, Jeffrey B.-H., Bao, Zhenan zbao@stanford.edu |
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| Zdroj: | Science. 7/2/2021, Vol. 373 Issue 6550, p88-94. 7p. 5 Diagrams. |
| Databáze: | Academic Search Ultimate |
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