Thermodynamic Approach to Optimization of SrTiO3 Chemical Vapor Deposition from Volatile Metalorganic Precursors.
| Autor: | Golubenko, A. N.1, Yakovkina, L. V.2, Smirnova, T. P.2 smirn@che.nsk.su, Shubin, Yu. V.2, Morozova, N. B.2, Danilovich, V. S.2 |
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| Zdroj: | Inorganic Materials. May2004, Vol. 40 Issue 5, p516-521. 6p. |
| Databáze: | Academic Search Ultimate |
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