Synthesis of Copper Nitride Layers by the Pulsed Magnetron Sputtering Method Carried out under Various Operating Conditions.
| Autor: | Wilczopolska, Magdalena1 (AUTHOR) magdalena.wilczopolska@ncbj.gov.pl, Nowakowska-Langier, Katarzyna1 (AUTHOR) grzegorz.strzelecki@ncbj.gov.pl, Okrasa, Sebastian1 (AUTHOR), Skowronski, Lukasz2 (AUTHOR) lski@utp.edu.pl, Minikayev, Roman3 (AUTHOR) minik@ifpan.edu.pl, Strzelecki, Grzegorz W.1 (AUTHOR), Chodun, Rafal4 (AUTHOR) rafal.chodun@inmat.pw.edu.pl, Zdunek, Krzysztof4 (AUTHOR) krzysztof.zdunek@pw.edu.pl, Bouclé, Johann (AUTHOR) |
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| Zdroj: | Materials (1996-1944). May2021, Vol. 14 Issue 10, p2694-2694. 1p. |
| Databáze: | Academic Search Ultimate |
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