Toward energy-efficient physical vapor deposition: Routes for replacing substrate heating during magnetron sputter deposition by employing metal ion irradiation.
Autor: | Li, X.1 (AUTHOR) xiao.li@liu.se, Bakhit, B.1 (AUTHOR), Jõesaar, M.P. Johansson2 (AUTHOR), Hultman, L.1 (AUTHOR), Petrov, I.1,3,4 (AUTHOR), Greczynski, G.1 (AUTHOR) |
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Zdroj: | Surface & Coatings Technology. Jun2021, Vol. 415, pN.PAG-N.PAG. 1p. |
Databáze: | Academic Search Ultimate |
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