Toward energy-efficient physical vapor deposition: Routes for replacing substrate heating during magnetron sputter deposition by employing metal ion irradiation.

Autor:	Li, X.1 (AUTHOR) xiao.li@liu.se, Bakhit, B.1 (AUTHOR), Jõesaar, M.P. Johansson2 (AUTHOR), Hultman, L.1 (AUTHOR), Petrov, I.1,3,4 (AUTHOR), Greczynski, G.1 (AUTHOR)
Zdroj:	Surface & Coatings Technology. Jun2021, Vol. 415, pN.PAG-N.PAG. 1p.
Databáze:	Academic Search Ultimate
Externí odkaz:	Zobrazit plný text záznamu Full Text from ScienceDirect