Principal Physics of Oblique Sputtering of Calcium Phosphate Coatings Using RF-Magnetron Discharge Plasma.
| Autor: | Prosolov, K. A.1 (AUTHOR) konstprosolov@gmail.com, Belyavskaya, O. A.1 (AUTHOR), Lastovka, V. V.1 (AUTHOR), Chaikina, M. V.2 (AUTHOR), Sharkeev, Yu. P.1 (AUTHOR) |
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| Zdroj: | Russian Physics Journal. Mar2021, Vol. 63 Issue 11, p1891-1897. 7p. |
| Databáze: | Academic Search Ultimate |
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