磁控溅射衬底加热温度和后退火温度对 制备 β-Ga2O3薄膜材料的影响.

Autor: 高灿灿1 403015906@qq.com, 姬凯迪1, 马 奎1,2,3, 杨发顺1,2,3 fashun@126.com
Zdroj: Journal of Synthetic Crystals. Feb2021, Vol. 50 Issue 2, p296-301. 6p.
Databáze: Academic Search Ultimate