SYNTHESIS OF MAGNETIC NANOCOMPOSITE FILMS SiCxNyFez BY PLASMA-ENHANCED CHEMICAL DECOMPOSITION OF A GASEOUS MIXTURE OF 1,1,1,3,3,3-HEXAMETHYLDISILAZANE, FERROCENE, AND HELIUM.

Autor:	Fainer, N. I.1 (AUTHOR) nadezhda@niic.nsc.ru, Plekhanov, A. G.1 (AUTHOR), Pushkarev, R. V.1 (AUTHOR), Shayapov, V. R.1 (AUTHOR), Maksimovskiy, E. A.1 (AUTHOR), Nadolinny, V. A.1 (AUTHOR), Korotaev, E. V.1 (AUTHOR), Kaichev, V. V.2 (AUTHOR)
Zdroj:	Journal of Structural Chemistry. Dec2020, Vol. 61 Issue 12, p1865-1875. 11p.
Databáze:	Academic Search Ultimate
Externí odkaz:	Zobrazit plný text záznamu