Modification and Polishing of the Holographic Diffraction Grating Grooves by a Neutralized Ar Ion Beam.

Autor:	Garakhin, S. A.1 (AUTHOR) GarakhinS@yandex.ru, Zorina, M. V.1 (AUTHOR), Zuev, S. Yu.1 (AUTHOR), Mikhailenko, M. S.1 (AUTHOR), Pestov, A. E.1 (AUTHOR), Pleshkov, R. S.1 (AUTHOR), Polkovnikov, V. N.1 (AUTHOR), Salashchenko, N. N.1 (AUTHOR), Chkhalo, N. I.1 (AUTHOR)
Zdroj:	Technical Physics. Nov2020, Vol. 65 Issue 11, p1780-1785. 6p.
Databáze:	Academic Search Ultimate
Externí odkaz:	Zobrazit plný text záznamu