Formation of Pores in Thin Germanium Films under Implantation by Ge+ Ions.

Autor: Lyadov, N. M.1 (AUTHOR) nik061287@mail.ru, Gavrilova, T. P.1 (AUTHOR), Khantimerov, S. M.1 (AUTHOR), Bazarov, V. V.1 (AUTHOR), Suleimanov, N. M.1 (AUTHOR), Shustov, V. A.1 (AUTHOR), Nuzhdin, V. I.1 (AUTHOR), Yanilkin, I. V.2 (AUTHOR), Gumarov, A. I.2 (AUTHOR), Faizrakhmanov, I. A.1 (AUTHOR), Tagirov, L. R.1,2 (AUTHOR)
Zdroj: Technical Physics Letters. Jul2020, Vol. 46 Issue 7, p707-709. 3p.
Databáze: Academic Search Ultimate
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