Flexible graphene-assisted van der Waals epitaxy growth of crack-free AlN epilayer on SiC by lattice engineering.

Autor:	Wang, Yunyu1,2 (AUTHOR), Yang, Shenyuan2,3 (AUTHOR), Chang, Hongliang1,2 (AUTHOR), Li, Weijiang1,2 (AUTHOR), Chen, Xiufang1,4 (AUTHOR) cxf@sdu.edu.cn, Hou, Rui2,3 (AUTHOR), Yan, Jianchang1,2 (AUTHOR), Yi, Xiaoyan1,2 (AUTHOR) spring@semi.ac.cn, Wang, Junxi1,2 (AUTHOR), Wei, Tongbo1,2 (AUTHOR) tbwei@semi.ac.cn
Zdroj:	Applied Surface Science. Aug2020, Vol. 520, pN.PAG-N.PAG. 1p.
Databáze:	Academic Search Ultimate
Externí odkaz:	Zobrazit plný text záznamu Full Text from ScienceDirect