Modification of MIS Devices by Radio-Frequency Plasma Treatment.
| Autor: | ANDREEV, D. V.1 vladimir_andreev@bmstu.ru, BONDARENKO, G. G.2, ANDREEV, V. V.1, MASLOVSKY, V. M.3, STOLYAROV, A. A.1 |
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| Zdroj: | Acta Physica Polonica: A. Aug2019, Vol. 136 Issue 2, p263-266. 4p. |
| Databáze: | Academic Search Ultimate |
| Externí odkaz: |
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