Contact resistance and lifecycle of a single- and multiple-contact MEMS switch.
| Autor: | Uvarov, Ilia V.1 (AUTHOR) i.v.uvarov@bk.ru, Marukhin, Nikita V.1 (AUTHOR), Naumov, Victor V.1 (AUTHOR) |
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| Zdroj: | Microsystem Technologies. Nov2019, Vol. 25 Issue 11, p4135-4141. 7p. |
| Databáze: | Academic Search Ultimate |
| Externí odkaz: |
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