Effect of Crystallinity and Morphology on the Electrical Properties of Y2O3 Thin Films Prepared by Pulsed Laser Deposition for MOSFET.
| Autor: | Babu, S. K. Suresh1,2, Youvanidha, A.1, Moni, D. Jackuline2 moni@karunya.edu, Divya, S.1 |
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| Zdroj: | International Journal of Nanoelectronics & Materials. Jul2019, Vol. 12 Issue 3, p339-348. 10p. |
| Databáze: | Academic Search Ultimate |
| Externí odkaz: |
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