Surface Topography and Optical Properties of Thin AlN Films Produced on GaAs (100) Substrate by Reactive Ion-Plasma Sputtering.

Autor:	Fomin, E. V.1,2 (AUTHOR) evgeny.fomin@bk.ru, Bondarev, A. D.2 (AUTHOR), Rumyantseva, A. I.3 (AUTHOR), Maurer, T.3 (AUTHOR), Pikhtin, N. A.2 (AUTHOR), Tarasov, S. A.1 (AUTHOR)
Zdroj:	Technical Physics Letters. Mar2019, Vol. 45 Issue 3, p221-224. 4p.
Databáze:	Academic Search Ultimate
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