Structure and Properties of Gallium-Oxide Films Produced by High-Frequency Magnetron-Assisted Deposition.

Autor: Kalygina, V. M.1 (AUTHOR) kalygina@ngs.ru, Lygdenova, T. Z.1 (AUTHOR), Novikov, V. A.1 (AUTHOR), Petrova, Yu. S.1 (AUTHOR), Tsymbalov, A. V.1 (AUTHOR), Yaskevich, T. M.1 (AUTHOR)
Zdroj: Semiconductors. Mar2019, Vol. 53 Issue 3, p388-394. 7p.
Databáze: Academic Search Ultimate
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