Surface defects on SOI wafers and their influence on device characteristics.
| Autor: | Naruoka, Hideki1, Hattori, Nobuyoshi1, Iwamatsu, Toshiaki1, Ipposhi, Takashi1, Sudo, Mitsuro2, Nakai, Tetsuya2, Yamamoto, Hidekazu1, Mashiko, Yoji1 |
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| Zdroj: | Electronics & Communications in Japan, Part 2: Electronics. Jul2003, Vol. 86 Issue 7, p64-72. 9p. |
| Databáze: | Academic Search Ultimate |
| Externí odkaz: |
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