Pulsed Plasmas For Sputtering Applications.
| Autor: | Sproul, W. D.1 bill.sproul@aei.com, Christie, D. J.1, Carter, D. C.1, Tomasel, F.1, Linz, T.2 |
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| Zdroj: | Surface Engineering. Jun2004, Vol. 20 Issue 3, p174-176. 3p. |
| Databáze: | Academic Search Ultimate |
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