Polymer-based X-ray masks patterned by direct laser writing.
| Autor: | Achenbach, Sven1, Wells, Garth2, Jacobs, Michael1,2, Moazed, Banafsheh1, Iyer, Swathi1, Hanson, Jack1 |
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| Zdroj: | Review of Scientific Instruments. Nov2018, Vol. 89 Issue 11, pN.PAG-N.PAG. 11p. 12 Diagrams, 1 Graph. |
| Databáze: | Academic Search Ultimate |
| Externí odkaz: |
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