Design and implementation of a photolithography system to fabricate microdevices from thin films.
| Autor: | Jairo Realpe, Jhon1 jhrealpe@unicauca.edu.co, Bolaños-Pantoja, Gilberto1 gbolanos@unicauca.edu.co, Fernando Florez, Juan2 jflorez@unicauca.edu.co |
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| Zdroj: | Dyna. Jun2018, Vol. 85 Issue 205, p294-301. 8p. |
| Databáze: | Academic Search Ultimate |
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