MORPHOLOGICAL AND STRUCTURAL CHARACTERIZATION OF THIN LAYERS OF TiN COATED ON THE SILICON SUBSTRATE.
| Autor: | Constantinescu, Stela1 |
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| Zdroj: | Proceedings of the International Multidisciplinary Scientific GeoConference SGEM. 2018, Vol. 18, p299-306. 8p. |
| Databáze: | Academic Search Ultimate |
| Externí odkaz: |
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