Forming Porous Structures on Silicon with a Ferroelectric for Capacitive Microelectronic and Microsystems Engineering Elements.
| Autor: | Semenova, O. V.1 olga-kipr@yandex.ru, Railko, M. Yu.1, Patrusheva, T. N.2 pat55@mail.ru, Merkushev, F. F.1, Podorozhyak, S. A.1, Yuzova, V. A.1, Korets, A. Ya.1, Khol’kin, A. I.3 |
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| Zdroj: | Theoretical Foundations of Chemical Engineering. Sep2018, Vol. 52 Issue 5, p862-867. 6p. |
| Databáze: | Academic Search Ultimate |
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