On the use of grazing-incidence small-angle X-ray scattering (GISAXS) in the morphological study of ion-implanted materials.

Autor: d'Acapito, Francesco1 dacapito@esrf.fr, Maurizio, Chiara1, Gonella, Francesco2, Cattaruzza, Elti2, Mattei, Giovanni3, Mondelli, Claudia4, Longo, Alessandro5, Martorana, Antonino6
Zdroj: Journal of Synchrotron Radiation. May2004, Vol. 11 Issue 3, p272-277. 6p. 1 Black and White Photograph, 1 Diagram, 1 Chart, 6 Graphs.
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