Quantitative determination of elemental diffusion from deeply buried layers by photoelectron spectroscopy.
Autor: | Zborowski, C.1,2, Renault, O.3, Torres, A.3, Guedj, C.3, Yamashita, Y.4, Ueda, S.4, Grenet, G.1, Tougaard, S.2 |
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Zdroj: | Journal of Applied Physics. 2018, Vol. 124 Issue 8, pN.PAG-N.PAG. 12p. 2 Color Photographs, 3 Charts, 7 Graphs. |
Databáze: | Academic Search Ultimate |
Externí odkaz: |
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