Reducing the macroparticle content of cathodic arc evaporated TiN coatings

Autor: Harris, S.G.1, Doyle, E.D.1, Wong, Y.-C.1 ywong@groupwise.swin.edu.au, Munroe, P.R.2, Cairney, J.M.2, Long, J.M.3
Zdroj: Surface & Coatings Technology. May2004, Vol. 183 Issue 2/3, p283-294. 12p.
Databáze: Academic Search Ultimate