Effect of Chemical Treatment of a Silicon Surface on the Quality and Structure of Silicon-Carbide Epitaxial Films Synthesized by Atom Substitution.
| Autor: | Kalinkin, I. P.1, Kukushkin, S. A.2,3,4 sergey.a.kukushkin@gmail.com, Osipov, A. V.2,3 |
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| Zdroj: | Semiconductors. Jun2018, Vol. 52 Issue 6, p802-808. 7p. |
| Databáze: | Academic Search Ultimate |
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